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Title: A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems
Authors: Ferreira, Antoine
Aphale, Sumeet Sunil
University of Aberdeen, School of Engineering
Keywords: control
lab-on-a-chip
microelectromechanical systems (MEMS)
modeling
nanoelectromechanical systems (NEMS)
TA Engineering (General). Civil engineering (General)
Issue Date: May-2011
Citation: Ferreira , A & Aphale , S S 2011 , ' A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems ' , IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews , vol 41 , no. 3 , pp. 350 - 364 .
URI: http://hdl.handle.net/2164/2126
DOI: http://dx.doi.org/10.1109/TSMCC.2010.2072779
ISSN: 1094-6977
Rights: "(c) 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works."
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