A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems
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Ferreira , A & Aphale , S S 2011 , ' A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems ' IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews , vol 41 , no. 3 , pp. 350 - 364 . DOI: 10.1109/TSMCC.2010.2072779
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