A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Ferreira, AntoineAphale, Sumeet Sunil2011-09-162011-09-162011-05Ferreira, A & Aphale, S S 2011, 'A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems', IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews, vol. 41, no. 3, pp. 350 - 364. https://doi.org/10.1109/TSMCC.2010.20727791094-6977ORCID: /0000-0002-1691-1648/work/68493111http://hdl.handle.net/2164/21261593523engcontrollab-on-a-chipmicroelectromechanical systems (MEMS)modelingnanoelectromechanical systems (NEMS)TA Engineering (General). Civil engineering (General)TAA Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical SystemsJournal article10.1109/TSMCC.2010.2072779413