Molecular dynamics investigation of nano-polishing on silicon carbide substrate with rough topography using a rotating diamond abrasive
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2024-12
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Wu, B, Sun, Y, Tan, H & Wu, S 2024, 'Molecular dynamics investigation of nano-polishing on silicon carbide substrate with rough topography using a rotating diamond abrasive', Materials Today Communications, vol. 41, 110744. https://doi.org/10.1016/j.mtcomm.2024.110744