A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems
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2011-05
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Ferreira, A & Aphale, S S 2011, 'A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems', IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews, vol. 41, no. 3, pp. 350 - 364. https://doi.org/10.1109/TSMCC.2010.2072779