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A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

dc.contributor.authorFerreira, Antoine
dc.contributor.authorAphale, Sumeet Sunil
dc.contributor.institutionUniversity of Aberdeen.Engineeringen
dc.contributor.institutionUniversity of Aberdeen.Centre for Applied Dynamics Research (CADR)en
dc.date.accessioned2011-09-16T09:05:07Z
dc.date.available2011-09-16T09:05:07Z
dc.date.issued2011-05
dc.description.statusPeer revieweden
dc.format.extent15
dc.format.extent93523
dc.identifier3298142
dc.identifier1cb90767-848a-4e2e-9a5e-63fa710e4470
dc.identifier85027932806
dc.identifier.citationFerreira, A & Aphale, S S 2011, 'A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems', IEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviews, vol. 41, no. 3, pp. 350 - 364. https://doi.org/10.1109/TSMCC.2010.2072779en
dc.identifier.doi10.1109/TSMCC.2010.2072779
dc.identifier.iss3en
dc.identifier.issn1094-6977
dc.identifier.otherORCID: /0000-0002-1691-1648/work/68493111
dc.identifier.urihttp://hdl.handle.net/2164/2126
dc.identifier.vol41en
dc.language.isoeng
dc.relation.ispartofIEEE Transactions on Systems, Man and Cybernetics, Part C: Applications and Reviewsen
dc.subjectcontrolen
dc.subjectlab-on-a-chipen
dc.subjectmicroelectromechanical systems (MEMS)en
dc.subjectmodelingen
dc.subjectnanoelectromechanical systems (NEMS)en
dc.subjectTA Engineering (General). Civil engineering (General)en
dc.subject.lccTAen
dc.titleA Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systemsen
dc.typeJournal articleen

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