Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter

Li, Linlin; Chen, Zaozao; Aphale, Sumeet S.; Zhu, LiMin

Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter

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Li_etal_IEEE_Fractional_Repetitive_AAM.pdf (4.02 MB)

Date

2020-04-15

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Citation

Li, L, Chen, Z, Aphale, S S & Zhu, L 2020, 'Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter', IEEE/ASME Transactions on Mechatronics, vol. 25, no. 2, pp. 547 - 557. https://doi.org/10.1109/TMECH.2020.2969222